| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for synthesizing and reacting carbonyl sulfide (COS), which is used as a main raw material for pesticides, medicines, and various chemical products, and has recently attracted attention as a novel etching gas material in semiconductor manufacturing processes.n n n More specifically, carbonyl sulfide (COS) which can minimize the formation of high-reaction and side reactions in a gas-liquid contact method by bubbling carbon monoxide (CO) through a submerged pipe to a reactor containing liquid sulfur. The synthesis method and the synthesis reaction apparatus.n n n According to the method of the present invention, it is possible to economically synthesize useful carbonyl sulfide with a simple reaction facility, to minimize the production of side reactions, and to continuously mass-produce. |