Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3255 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-495 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate |
2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-100934516-B1 |
titleOfInvention |
Plasma-resistant ceramic with controlled electrical resistivity |
abstract |
Certain ceramic materials are provided that are resistant to corrosion / erosion under semiconductor processing conditions utilizing corrosive / erosive plasma. The corrosive plasma may be a halogen-containing plasma. Certain ceramic materials are improved to provide a controlled electrical resistivity that suppresses the possibility of plasma arc generation. |
priorityDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |