http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100934304-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J35-0006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J21-04 |
| filingDate | 2002-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100934304-B1 |
| titleOfInvention | Fluorocarbon Decomposition Agent and Decomposition Method |
| abstract | A fluorocarbon decomposition treatment agent comprising an aluminum compound and a lanthanoid compound as an active ingredient, wherein the decomposition treatment agent comprises a decomposition treatment agent containing an aluminum compound, a lanthanoid compound and an alkaline earth metal compound as an active ingredient; And contacting the fluorocarbon-containing gas under heating with the above-described decomposition treatment agent or with the decomposition treatment agent containing aluminum oxide as an active ingredient and then contacting the decomposition treatment agent including lanthanoid oxide and alkaline earth metal oxide. Disclosed is a method for decomposing fluorocarbons. According to the above decomposition treatment and decomposition treatment method, the fluorocarbons contained in the exhaust gas discharged from the semiconductor manufacturing industry and similar processes can be decomposed in a short period of time without inactivation of the decomposition treatment agent or the release of corrosive gas such as hydrogen fluoride into the atmosphere. It can be decomposed at a decomposition rate of at least 99.9% at a relatively low temperature of 占 폚 or lower. |
| priorityDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 113.