| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799b6c8cb40ea97102dceda7bfe7b5c7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3842 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 |
| filingDate |
2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00459dfd923c0e5035468eabe97bf45d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac511dbf8c77fa868df27b35b8b9803e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b655b3db48b04aa359cee90fa11c8fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fd734b9bc24ec2e032a784517e97689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fb273d852120b199d4e8712dae5daed |
| publicationDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100928184-B1 |
| titleOfInvention |
Highly durable replica mold for nanoimprint lithography and its manufacturing method |
| abstract |
The present invention provides a replica mold that has high durability against chemical, thermal and mechanical stress, can be very suitably used for various nanolithography techniques including thermal NIL and optical NIL, and a method for easily and inexpensively producing a replica mold. do.n n n Formula 1:n n n n n n n n A replica mold is produced using an organic-inorganic hybrid resin having a Si-O-Ti network represented by (wherein R is a hydrocarbon group having 1 to 3 carbon atoms and PM is a residue of propylmethacrylic acid). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10144155-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013115570-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200133958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101192470-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108673795-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102212605-B1 |
| priorityDate |
2008-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |