http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100912961-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66825 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100912961-B1 |
| titleOfInvention | Device Separating Method of Semiconductor Device |
| abstract | The present invention prevents the loss of the insulating film for the device isolation film that protects the sidewalls of the gate insulating film during the device isolation film forming process of the semiconductor device to form a device isolation film of the semiconductor device that can improve the cycling characteristics and reliability of the device The present invention provides a method for forming a gate insulating film, a gate conductive film, and a pad nitride film on a substrate, and etching the pad nitride film, the gate conductive film, the gate insulating film, and a portion of the substrate. Forming a trench, sequentially forming a first insulating film and a second insulating film for a device isolation layer embedded in the trench, and performing a wet etching process using an etching solution having a different concentration. Recessing a second insulating film, and filling the second trench with the second insulating film; Forming a third insulating film for a device isolation film, removing the pad nitride film, and recessing the first and third insulating films to a predetermined depth. do.n n n n SOD, PSZ, device separator, wet etching process, etching solution, concentration |
| priorityDate | 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.