http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100911740-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30469 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2007-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100911740-B1 |
| titleOfInvention | System for Field Emission and Electrical Property Measurement |
| abstract | The present invention relates to a system for measuring the physical properties of a measurement sample in a high vacuum state, the multifunctional vacuum measurement system for measuring the physical properties of the measurement sample in a high vacuum state, comprising: a vacuum chamber; A grid electrode formed in the vacuum chamber; A high voltage power supply for applying a voltage to the grid electrode through a feedthrough formed to penetrate one surface of the vacuum chamber; A turbo pump for evacuating the vacuum chamber; A sample probe as a cathode for measuring the physical properties of the measurement sample with the measurement sample mounted and inserted into the vacuum chamber; And a liquid refrigerant circulation path for supplying a liquid refrigerant to pass through the sample probe, wherein the sample probe is formed from the vacuum chamber without affecting the degree of vacuum of the vacuum chamber while the measurement sample is mounted. It is characterized in that it is configured to be removable.n n n n Vacuum chamber, carbon nanotube (CNT), field emission characteristics, DAQ |
| priorityDate | 2007-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.