| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6cbb4f9f4e850ad0c874182a079b5eea |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 |
| filingDate |
2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8344a4dfdbe7cc3752fc4cf05ac7cf1b |
| publicationDate |
2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100909215-B1 |
| titleOfInvention |
Method for preparing polysilazane and polysilazane solution with reduced ammonia substitution of silicon-hydrogen bond |
| abstract |
The present invention relates to a method for preparing polysilazane capable of minimizing ammonia substitution of a silicon-hydrogen bond of a starting material, and specifically, a method for synthesizing polysilazane using a solution in which phase separation occurs and using the same. A method for producing a polysilazane solution for a wafer. The present invention provides a method for producing polysilazane using halosilane and anhydrous liquid ammonia, wherein anhydrous ammonia is added and stirred in a solvent, followed by addition of halosilane to a solution separated into two phases. Provided are methods for preparing polysilazane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9738787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210021701-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210045649-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102260650-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102290528-B1 |
| priorityDate |
2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |