http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100871771-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc8d5b80410c3a0594da023cfabcbe0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34 |
| filingDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13c2797561568a4832760eaa08bf52dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a56a11d70d289233da115afc18fd035 |
| publicationDate | 2008-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100871771-B1 |
| titleOfInvention | Piperidine-based copolymer, a method for producing the copolymer, an organic antireflection film containing the copolymer and an organic antireflection film comprising the composition |
| abstract | The present invention provides a piperidine-based copolymer which can be used in ultra-fine circuit processing process using far ultraviolet rays when manufacturing a semiconductor device, a method of preparing the copolymer, an organic anti-radiation film composition containing the copolymer, and an organic reflection using the composition. An anti-reflection film and a method for producing the organic anti-reflection film are provided.n n n The organic anti-reflection film using a copolymer containing a hydroxymethyl-protected piperidine derivative according to the present invention, when used in the manufacture of highly integrated devices of gigabit DRAM, improves the adhesion to the substrate and the interlayer reflection and standing wave phenomenon of the circuit The production yield of the semiconductor device can be increased by stably forming a high resolution microcircuit of 60 nm to 150 nm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113176707-A |
| priorityDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.