http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100870264-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7026 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2007-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbf11cc22579175fc35fb96b3db144a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89f4dc16250088068d2f48f3fa547a6a |
| publicationDate | 2008-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100870264-B1 |
| titleOfInvention | Method of forming fine pattern of semiconductor device |
| abstract | The present invention relates to a method of forming a fine pattern of a semiconductor device, comprising: forming an etching target layer, a first auxiliary layer, a separation layer, and a second auxiliary layer on a semiconductor substrate; Performing a process; performing a second exposure process by focusing on the second auxiliary layer; developing the second auxiliary layer to form a second auxiliary pattern; and etching the second auxiliary pattern. Etching the separator and the first auxiliary layer using an etching process to form a first auxiliary pattern, and removing the second auxiliary pattern and the separator remaining after etching the separator and the first auxiliary layer And developing the first auxiliary pattern to form a third auxiliary pattern, and etching the etch target layer using the third auxiliary pattern. |
| priorityDate | 2007-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.