http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100865837-B1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-132 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02141 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-605 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54 |
filingDate | 2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100865837-B1 |
titleOfInvention | filter |
abstract | It provides a low loss and high resistance to ESD breakdown. The present invention provides a plurality of piezoelectric thin film resonators having a substrate, a lower electrode provided on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion facing the lower electrode with the piezoelectric film interposed therebetween. Some of the plurality of piezoelectric thin film resonators S11, S14, P11, and P14 include a first resonator 41 in which at least a portion of the outer circumference of the piezoelectric film is located outside the outer circumference of the region where the upper electrode and the lower electrode face each other. The second part of the plurality of piezoelectric thin film resonators (S12, S13, P12, P13) is a second resonator in which at least a part of the outer circumference of the piezoelectric film is substantially coincident with or located inside the outer circumference of the region where the upper electrode and the lower electrode face each other. (42), which is a filter.n n n n Piezoelectric Thin Film Resonators, Piezoelectric Films, Filters, Substrates, Lower Electrodes, Upper Electrodes |
priorityDate | 2006-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.