http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100864930-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1146d1dc4ffd66d77c25805ca3f9a74f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1339 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823468 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1339 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 |
| filingDate | 2007-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e96920f8ef28cc4915f95c3fa5978d1 |
| publicationDate | 2008-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100864930-B1 |
| titleOfInvention | Manufacturing method of drive element for liquid crystal display element |
| abstract | The present invention relates to a method for manufacturing a drive element for a liquid crystal display element comprising a transistor having a multilayer spacer. A manufacturing method according to an embodiment of the present invention, forming a gate insulating film and gate electrodes sequentially stacked on a semiconductor substrate; Sequentially depositing a first spacer material film, a second spacer material film, and a third spacer material film on the semiconductor substrate to cover the gate electrodes; Leaving the first, second and third spacer material films on sidewalls of the gate electrodes and leaving the first and second spacer material films on the semiconductor substrate by plasma dry etching for etch back etching; Removing the second spacer material film remaining on the semiconductor substrate by wet etching; And controlling the thickness of the first spacer material film. |
| priorityDate | 2007-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.