| abstract |
The quartz glass parts and ceramic parts used in the film forming apparatus and the pre-cleaning apparatus in the manufacture of semiconductors, etc. are peeled from those parts during use, peeling of thin film substrates attached to the surface of the parts, and parts made by plasma. Problems such as shortening of component life due to corrosion of the surface and reduction of productivity due to frequent replacement of components. Quartz glass parts and ceramic parts used in film forming apparatuses and precleaning apparatuses in the manufacture of semiconductors, etc. WHEREIN: A thin film type | mold which has surface roughness Ra of 5-20 micrometers with respect to the component comprised from the ceramic thermal sprayed coating. High adhesion to the adhesive, having a surface roughness Ra of 1 to 5 占 퐉 has high plasma corrosion resistance, and for a thermal sprayed coating formed on the substrate on which the ceramic thermal sprayed film is to be formed, it is possible to form a groove having a large anchor effect from the substrate. It is free from peeling of the ceramic thermal sprayed coating and has high durability. n n n n Quartz glass parts, ceramic parts, manufacturing method |