| abstract |
This invention relates to the fluorine-containing cyclic compound represented, for example by following General formula (1).n n n Formula 1n n n n n n n n (Wherein R 1a is a C 1 -C 25 cyclic alkyl group, a cyclic alkenyl group, or a cyclic alkynyl group; R 2 and R 3 are each independently a hydrogen atom, a halogen atom, or a straight chain, minute, C 1 -C 25 group; A ground or cyclic alkyl group; R 1a , R 2 And each of R 3 may include an atomic group having a fluorine atom, an oxygen atom, a sulfur atom, a nitrogen atom, or a carbon-carbon double bond.)n n n Fluorine-containing cyclic compounds, photoresist, chemically amplified resist |