http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100839638-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2006-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100839638-B1 |
| titleOfInvention | Oxide Sintered Tablet and Oxide Transparent Conductive Film for Evaporation |
| abstract | According to the present invention, an oxide transparent conductive film having a low light resistance and a high light transmittance is produced by a vapor deposition apparatus having a continuous supply system using various vacuum deposition methods such as electron beam deposition. Contamination in the vacuum chamber can be prevented without being generated, and damage materials are not deposited on mechanical parts such as rod shafts for continuous feeding systems or rotary shafts for rotary tables, so that they do not interfere with smooth driving. An oxide sintered tablet is provided.n n n The present invention is an oxide sintered tablet for vapor deposition which is used when forming a film by vacuum deposition using a vapor deposition apparatus having a continuous supply system, wherein the oxide sintered tablet for vapor deposition has a cylindrical shape, and the edge portion formed by the bottom and side surfaces thereof has a cross section. It is characterized by having a C-necked shape of 0.7 to 5 mm in length, or an R-necked shape of 0.7 to 5 mm in diameter, or having a ten-point average roughness Rz of the side surface of the columnar shape of 110 µm or less. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102152147-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150012808-A |
| priorityDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.