| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D17-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2004-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100836055-B1 |
| titleOfInvention |
Superhydrophilic Ti-O-C Nano Nano Thin Films and Manufacturing Method Thereof |
| abstract |
Super-hydrophilic Ti-O-C based nano thin films with improved deposition thickness and excellent deposition uniformity were prepared by mixing a low boiling point and a high volatility liquid with Ti precursor. The catalyst promotes vaporization of the Ti precursor and facilitates injection of the Ti precursor into the reaction chamber, thereby improving the plasma polymerization efficiency. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9028925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101319900-B1 |
| priorityDate |
2006-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |