http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100834492-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa4024e6ff4d492ae830f76f77594556 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc2d41e213817a8cd2868664c20816c4 |
| publicationDate | 2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100834492-B1 |
| titleOfInvention | Semiconductor Reaction Byproduct Trap Device |
| abstract | It actively blocks the reaction by-products generated in the process chamber from being sucked into the vacuum pump during deposition and etching of the thin film, and secures the maximum effective area where the reaction by-products can be actually collected. Disclosed is an improved reaction byproduct trap device for semiconductors that can be easily removed for the collected reaction byproducts. The trap device includes a hollow trap housing. The multiple trap plates are arranged horizontally and parallel to each other inside the trap housing. The heater is disposed perpendicular to the trap housing through the trap plates to heat the trap plates. The mesh structure is disposed at least one or more in plate shape between the trap plates. At least one or more flow holes are formed in the mesh structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101865337-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020169384-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102352734-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112403108-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101280541-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112403108-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101840332-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190078939-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102036273-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11054174-B2 |
| priorityDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.