http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100829826-B1

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filingDate 2007-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c950799c3bebeec02f762c5144547aea
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publicationDate 2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100829826-B1
titleOfInvention Composition for etching gold / titanium thin film and etching method
abstract The present invention relates to an etching composition capable of simultaneously etching a gold / titanium thin film without affecting a substrate layer such as a PMMA panel and an etching method using the same, comprising: a) 20 to 55 wt% of hydrochloric acid, b) 5 to 5 nitric acid It provides a composition for etching gold / titanium thin film comprising 25% by weight, c) 0.1 to 15% by weight of fluoride, d) 1 to 20% by weight of chloric acid, and e) remaining water and an etching method using the same.
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