| abstract |
The wet chemical processing chamber of the present invention is disposed in a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal in contact with the fixed unit and the detachable unit, the fixed unit and / or the detachable unit. Processing components to be included. The stationary unit may have a mounting fixture and a first flow system configured to send the process fluid through the stationary fixture to stationarily attach the stationary unit to the platform or deck of the integrated process tool. The detachable unit can include a second flow system configured to direct the processing fluid from and / or to the first flow system of the stationary unit. The seal has an orifice, through which the processing fluid can flow between the first and second flow systems, and the processing component is subjected to the processing fluid for treating the surface on the microfeature workpiece having microfeatures of 1 micron or less. Certain characteristics can be given.n n n n Microfeature workpieces, electrode assemblies, membranes, wet chemical processing chambers, mounting modules |