http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100816698-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2001-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100816698-B1 |
| titleOfInvention | Manufacturing method of porous SOO film |
| abstract | The present invention provides an organic silane solution containing organic silane, water and alcohol; The organic silane solution is hydrolyzed under acidic or alkaline conditions; It relates to a method for producing a porous SOG film comprising the step of heating the obtained mixture in the presence of a surfactant. The method enables the production of a porous SiO 2 film having a low relative dielectric constant and no change in relative dielectric constant even when the film is laminated thereon in a semiconductor process after formation of the film. The organic silane is preferably hydrolyzable organic silane such as TEOS and TMOS, and the surfactant is preferably a cationic surfactant, especially a cationic surfactant based on halogenated alkyl trimethylammonium. The porous SOG film produced by this method is suitable for use as an interlayer insulating film. |
| priorityDate | 2000-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.