http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100801395-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49156 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2007-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100801395-B1 |
| titleOfInvention | Manufacturing method of probe sheet |
| abstract | As a method for producing a high-precision probe sheet for narrow-pitch and high-density electrode pads with high integration of semiconductor chips, and for inspecting semiconductor chips, densified and narrowed to the same extent as electrode pads with pointed ends. By forming a large space area in which the terminal metal and the selectively removable metal film are arranged in advance in the terminal peripheral area of a fine contact terminal, the occurrence of damage in the inspection process can be greatly reduced, thereby minimizing and improving durability. do.n n n n Thin film probe sheet, probe card, semiconductor chip, inspection device, electrode pad |
| priorityDate | 2004-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.