| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-315 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_828b76d54b35c702424ee06837d5dba9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fc462d61ea464606fd09c8a470918cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f084a79c9e086818e844a60027c095c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9172f2fe6cd432c101ee30e4c29ca78b |
| publicationDate |
2008-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100796724-B1 |
| titleOfInvention |
Capacitors and manufacturing methods thereof |
| abstract |
Disclosed are a capacitor having excellent electrical characteristics and a method of manufacturing the same. The capacitor includes a lower electrode, a dielectric layer, an upper electrode, a barrier layer, and a capping layer. The lower electrode has a cylinder type, and the dielectric layer is formed on the lower electrode and has a substantially uniform thickness. The upper electrode is formed on the dielectric layer and has a substantially uniform thickness. The capping film is formed on the upper electrode and includes a silicon germanium film doped with p-type impurities. The barrier layer is interposed between the upper electrode and the capping layer to prevent the p-type impurity from penetrating into the dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9287270-B2 |
| priorityDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |