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filingDate 2001-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100794864-B1
titleOfInvention A semiconductor device comprising a boron diffusion barrier layer and a method of manufacturing the semiconductor device
abstract A method of manufacturing a semiconductor device includes providing a semiconductor substrate, forming an oxide film on the substrate, and adding nitrogen gas on top of an exposed surface of the oxide film to form a diffusion barrier.n n n n Semiconductor device, diffusion barrier, oxide, semiconductor substrate, nitrogen gas
priorityDate 2000-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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