http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100788808-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 |
| filingDate | 2001-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100788808-B1 |
| titleOfInvention | Positive Electron or X-Ray Resist Composition |
| abstract | It is an object of the present invention to provide a positive electron beam or X-ray resist composition having high resolution and a positive electron beam or X-ray resist composition having high sensitivity as well as high resolution.n n n The present invention (A) a compound which generates an acid by irradiation of an electron beam or X-rays,n n n (B1) A low molecular weight dissolution inhibiting compound having a group having a molecular weight of more than 1000 and not more than 3000, which has a group that can be decomposed by the action of an acid, and the solubility in an alkaline developer is increased by the action of an acid.n n n In the positive resist composition containingn n n It consists of a positive electron beam or an X-ray resist composition characterized by having a structure in which two or more triphenylmethane structures are non-conjugated connected to parts other than the group which can be decomposed by the action of the acid of the low molecular weight dissolution inhibiting compound. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100958389-B1 |
| priorityDate | 2000-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 506.