http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100787725-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2004-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100787725-B1 |
| titleOfInvention | Wiring correction device |
| abstract | The wiring correction apparatus includes an XY stage on which a substrate is mounted, a laser light source unit disposed above the XY stage, first and second gas windows disposed between the laser light source unit and the XY stage, and first and second CVD gases. It includes a unit. The laser light source unit emits a laser beam against the quartz portion of the substrate. This laser beam passes through the first or second gas window. The first CVD gas unit supplies A1 source gas (DMAH gas) to the first gas window, while the second CVD gas unit supplies Cr source gas (Cr (CO) 6 gas) to the second gas window. .n n n n Wiring Corrector, Substrate, XY Stage, Laser Light Source Unit, Gas Window, CVD Gas Unit |
| priorityDate | 2003-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.