http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100776551-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-3154 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-146 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2002-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100776551-B1 |
| titleOfInvention | Resist composition |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemically amplified resist composition that provides a resist pattern excellent in transparency to radiation and dry etching, and also excellent in sensitivity, resolution, flatness, heat resistance, and the like.n n n Specifically, the present invention relates to a fluorine-containing polymer (A) having a repeating unit in which the fluorine-containing diene represented by the general formula (1) is cyclopolymerized, and also having a blocking acidic group on Q, which generates light upon irradiation with light. It relates to a resist composition comprising an acid generating compound (B) and an organic solvent (C):n n n CF 2 = CR 1 -Q-CR 2 = CH 2 ... (One)n n n (However, R 1 and R 2 each independently represent a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group, and Q is a blocked acidic group or a blocked acidic group which is a divalent organic group and can express an acidic group by acid. Organic groups having groups that can be converted to acidic groups). |
| priorityDate | 2001-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 135.