http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100772639-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2005-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100772639-B1 |
| titleOfInvention | Stamp for fine imprint lithography using diamond-like carbon thin film and its manufacturing method |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine imprint lithography process technology, and more particularly, to a stamp used in a UV microimprint lithography process technology, a heating type microimprint lithography process technology, and a method of manufacturing the stamp.n n n The stamp manufacturing method of the present invention comprises the steps of depositing a diamond-like carbon (DLC) thin film on a substrate, applying a resist on the diamond-like carbon thin film, patterning the resist, and Etching the diamond-like carbon thin film using the patterned resist as a protective film, and removing the resist.n n n n Fine Imprint Lithography, Diamond Carbon Film, Hydrophilic, Hydrophobic |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101069545-B1 |
| priorityDate | 2005-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.