http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100744223-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q50-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q50-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G10L13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-426 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-26 |
filingDate | 2005-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2007-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100744223-B1 |
titleOfInvention | Non-aqueous, non-corrosive microelectronic cleaning composition containing polymeric corrosion inhibitor |
abstract | The photoresist strippers and cleaning compositions of the present invention are essentially non-corrosive to copper as well as aluminum, and include one or more polar organic solvents, one or more hydroxylated organic amines, and a large number of hydroxyls suspended in the polymer backbone. Provided by a non-aqueous cleaning composition comprising at least one corrosion inhibitor polymer having an amino-functional group.n n n Photoresist Remover, Cleaning Composition |
priorityDate | 2004-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.