http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100732282-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate | 2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96bd32a5f5c69e4cd7ed67511c4864cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca211af9f781e86015cff02daf209cc |
| publicationDate | 2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100732282-B1 |
| titleOfInvention | Method of forming a semiconductor device |
| abstract | The present invention relates to a method of forming a semiconductor device, in order to solve the problem of falling of a cylindrical storage electrode in forming a capacitor of the semiconductor device, the sacrificial layer for forming the storage electrode is formed of an amorphous carbon layer, in this process Due to the light absorption of the amorphous carbon layer, the alignment process of the storage electrode contact plug and the photoresist mask pattern for the storage electrode cannot be performed normally. A polysilicon layer is further added on top of the SiON film used as a hard mask of the amorphous carbon layer. The present invention relates to a method for forming a semiconductor device which can reduce the risk of misalignment and can stably perform a capacitor forming process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100925032-B1 |
| priorityDate | 2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.