http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100722989-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-56 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31641 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02189 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate | 2005-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100722989-B1 |
| titleOfInvention | Capacitor and manufacturing method thereof |
| abstract | The present invention provides a capacitor fabrication method suitable for improving dielectric constant and leakage current characteristics of a capacitor to secure a dielectric capacity. A dielectric film having a crystalline zirconium oxide film and an amorphous aluminum oxide film stacked on the lower electrode; And an upper electrode on the dielectric film. Accordingly, the present invention provides a method of manufacturing a high-k dielectric material by maintaining the crystallinity of a zirconium oxide (ZrO 2 ) as a high-k film material and increasing the dielectric constant by using an amorphous aluminum oxide (Al 2 O 3 ) , The leakage current characteristic is reduced, and the characteristics of the capacitor are improved.n n n n A zirconium oxide film (ZrO2), an aluminum oxide film (Al2O3), a dielectric film, a capacitor |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100971415-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177263-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10297600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9978753-B2 |
| priorityDate | 2005-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.