http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100715184-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ccf161ef35b336966cff4013963090b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4feeee89058fe0bc18115bef328a478 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4341e9ed06f45bf3d581bd8eaaafb494 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02934cac50cc9bbe1988c1cf760bff18 |
| publicationDate | 2007-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100715184-B1 |
| titleOfInvention | Slurry Composition for Silicon Wafer Polishing and Polishing Method Using the Same |
| abstract | The present invention relates to a slurry composition for polishing silicon wafers, and more particularly, to a composition containing colloidal silica having an average particle diameter of 50 to 150 nm, a pH adjuster, and deionized water, in which an aminoalkyl group to which an alcohol group is added is substituted to enhance cleaning property. A slurry comprising a heterocyclic nitrogen compound and a salt of an organic acid as a component.n n n Performing the backside polishing process using the polishing slurry according to the present invention can greatly reduce the amount of stain generation after polishing and provide an effect of improving the reliability after the package.n n n n Silicon wafer, silica. Cyclic amines, salts of organic acids, reliability |
| priorityDate | 2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.