http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100710450-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2003-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100710450-B1 |
| titleOfInvention | Gas introduction method to the processing apparatus provided with the shower head part |
| abstract | The present invention provides a processing container having a processing space for carrying out a predetermined process with respect to a target object, and a plurality of divided partitions for diffusing and supplying a gas supplied while supplying a source gas or a reducing gas into the processing space. It is a gas introduction method to the processing apparatus provided with the shower head part which has a seal | sticker. The method selects a combination in which the pressure difference between the pressure of the diffusion chamber supplied with the reducing gas and the pressure of the diffusion chamber supplied with the source gas is greater among the combinations of the source gas, the reducing gas, and the plurality of diffusion chambers. And a supply step of supplying the respective gases to the respective diffusion chambers based on the selection step and the combination selected in the selection step. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130098016-A |
| priorityDate | 2002-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.