http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100709990-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 |
| filingDate | 2003-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100709990-B1 |
| titleOfInvention | Film Forming Materials, Film Forming Methods and Devices |
| abstract | The present invention provides a technique for producing a silicide film that can be sufficiently used for next-generation transistors by CVD.n n n In the film forming material for forming the silicide film consisting of one or two metal elements and Si selected from the group consisting of Co and Ni,n n n As the raw material of the metal element, one or two or more compounds selected from the group consisting of the following general formula [I] and general formula [II] are used.n n n General formula [Ⅰ]n n n n n n n n (Wherein M is Co or Ni, n is 2 or 3, R 1 , R 2 , R 3 is H or an alkyl group)n n n General formula [Ⅱ]n n n n n n n n (Wherein M is Co or Ni, R 1 , R 2 , R 3 , R 4 , R 5 is H or an alkyl group) |
| priorityDate | 2002-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.