abstract |
An object of the present invention is to provide an oxide solid solution powder containing cerium oxide as a main component, which can be used as an abrasive, and to provide a polished surface with high polishing surface precision when used as an abrasive.n n n In order to solve the above problems, an oxide solid solution powder in which calcium oxide is dissolved in a rare earth oxide containing cerium oxide as a main component can be used to obtain a polished surface with high polishing surface precision when polishing a glass material such as a glass substrate. It exists and is suitable as an abrasive. When a calcium element is dissolved in a rare earth oxide containing cerium oxide as a main component, it is considered that the chemical polishing force is increased and higher polishing surface precision is obtained.n n n n Oxide solid solution, cerium oxide, rare earth oxide, abrasive |