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filingDate 2001-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100703763-B1
titleOfInvention Low dielectric constant film forming material, and film and semiconductor device using the same
abstract A low dielectric constant coating material suitable as an interlayer insulating film material is provided. Moreover, the semiconductor device which has a low dielectric constant film and is highly reliable is provided.n n n The low dielectric constant film forming material is obtained by dissolving siloxane resin and polycarbosilane in a solvent. Using this solution, a low dielectric constant film containing a siloxane resin and a polycarbosilane bonded to the siloxane resin is formed.
priorityDate 2000-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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