| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0179
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0175 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-12 |
| filingDate |
2005-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100703077-B1 |
| titleOfInvention |
Method for manufacturing crystalline dielectric thin film, and crystalline dielectric thin film manufactured thereby and thin film capacitor having same |
| abstract |
Provided are a method for producing a crystalline dielectric thin film capable of forming a crystalline dielectric thin film at a low temperature of 300 ° C or lower. A method of manufacturing a crystalline dielectric thin film according to the present invention comprises the steps of forming an amorphous dielectric thin film on a substrate; Crystallizing the dielectric thin film by immersing the amorphous dielectric thin film in water and hydrothermally treating the enclosed space.n n n n Thin Film Capacitors, Dielectric |
| priorityDate |
2005-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |