http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100701555-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-812 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
filingDate | 2003-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100701555-B1 |
titleOfInvention | Semiconductor device and display device using the same |
abstract | In the reverse staggered MOSFET 1, a gate insulating layer 4 made of zinc oxide, which is a channel layer 5 which is the semiconductor layer, is formed of amorphous aluminum oxide. By such a structure, the defect level in the interface between the channel layer 5 and the gate insulating layer 4 is reduced, and the performance equivalent to the semiconductor device which produced all the laminated films by the crystalline laminated film can be obtained. . Such a method can also be applied to a forward staggered MOSFET and the like, and has high versatility.n n n n Semiconductor layer, zinc oxide, group II oxide, amorphous, aluminum oxide, field effect transistor (FET) |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101810261-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130113979-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102122393-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8618543-B2 |
priorityDate | 2002-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.