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filingDate 2000-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2007-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100699739-B1
titleOfInvention III-V compound semiconductor
abstract Formula In u Ga v Al w N (u + v + w = 1, 0 u 1, 0 v 1, 0 w A layer formed from the first group III-V compound semiconductor represented by 1) and the layer III-V compound semiconductor as well as the second group III-V compound semiconductor, which will be described later, on the layer. On the formed pattern and the first group III-V compound semiconductor and the pattern, the general formula In x Ga y Al z N (x + y + z = 1, 0 x 1, 0 y 1, 0 z A group III-V compound semiconductor having a layer formed from a second group III-V compound semiconductor represented by 1), wherein the reflection X-ray locking curve of the group III-V compound semiconductor ( A group III-V compound semiconductor is provided, characterized in that the full width at half maximum (FWHM) of the reflection X-ray rocking curve) is 700 seconds or less regardless of the X-ray incident direction. The group III-V compound semiconductor, which is a high quality semiconductor, is suppressed from generating low angle grain boundaries.
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