http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100694369-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2220-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S95-901 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2220-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2220-485 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-2803 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 |
| filingDate | 1999-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100694369-B1 |
| titleOfInvention | Halogen Exhaust Purifier and Purification Method |
| abstract | The present invention relates to a purifying agent and a purifying method for efficiently removing harmful halogen-based gases such as fluorine, chlorine, boron trifluoride, boron trichloride, tungsten hexafluoride, and silicon tetrachloride contained in gases discharged from a semiconductor manufacturing process.n n n The purifying agent is impregnated with an alkali metal salt of formic acid and / or an alkaline earth metal salt of formic acid on activated carbon, or an alkali metal hydroxide and / or an alkali earth metal hydroxide together with an alkali metal salt of formic acid and / or an alkaline earth metal salt of formic acid on activated carbon. Get it done.n n n When the exhaust gas is brought into contact with the purifier, the harmful halogen gas in the exhaust gas is efficiently removed, and desorption from the purifier is hardly caused.n n n Further, the safety and efficiency of the purification process can be further improved by disposing a purifying agent having a metal oxide or a metal oxide as an active ingredient as a pretreatment purifier, and disposing a purifying agent having sodium formate attached to the metal oxide as a post-treatment purifier. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190002657-U |
| priorityDate | 1998-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 99.