http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100685198-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1345 |
| filingDate | 2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100685198-B1 |
| titleOfInvention | Positive photoresist composition and system for forming resist pattern for manufacturing system LCD |
| abstract | A resist pattern having a good shape can be formed, and a positive type photoresist composition and a resist pattern forming method for LCD production, in which an integrated circuit and a liquid crystal display portion are formed on one substrate suitable for system LCD production, are provided. The photoresist composition is a positive photoresist composition containing (A) an alkali-soluble resin and (B) a quinone diazide group-containing compound, and when forming a resist pattern, a resist film is formed using the positive photoresist composition. The surface poorly soluble layer can be formed on the surface of this resist film by the heating (post exposure bake) treatment after the selective exposure. |
| priorityDate | 2003-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 181.