http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100674532-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0393 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate | 2005-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100674532-B1 |
| titleOfInvention | Method and apparatus for forming a metal thin film on the polymer |
| abstract | The present invention relates to a method and apparatus for depositing a metal thin film on a polymer surface by plasma ion implantation. Specifically, the present invention provides a method and apparatus for depositing a metal by generating a plasma and then sputtering by applying a negative voltage to the metal target and injecting ions by applying a high voltage pulse to the polymer sample. do.n n n According to the present invention, a negative pulse voltage is applied to a polymer substrate to fuse a plasma ion implantation method and a metal deposition method to deposit a metal thin film, thereby forming a smooth interfacial layer, thereby improving adhesion.n n n n Polymer, Adhesion, Metal Thin Film, Formation Method, Plasma, High Voltage Pulse, Ion Implantation |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102179122-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200003638-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101181449-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101055396-B1 |
| priorityDate | 2005-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.