http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100673011-B1

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247
filingDate 2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11efd5149b01a152f3d7f75edb3a9f06
publicationDate 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100673011-B1
titleOfInvention NOR flash memory device and manufacturing method thereof
abstract A NOR flash memory device and a method of manufacturing the same are provided. The device includes active regions formed in a semiconductor substrate having a cell array region, a high voltage transistor region, and a low voltage transistor region, a gate structure across the active regions, a source region and a drain region formed in the active regions adjacent to the gate structure, and a gate structure. It includes a lower spacer formed on both sides of the. In this case, the lower spacer fills the space between the gate structures in the upper portion of the source region of the cell array region, and is formed of a silicon oxide layer.
priorityDate 2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 24.