http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100668742-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2005-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_499bc68359764d9caede29d781f2fb09 |
| publicationDate | 2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100668742-B1 |
| titleOfInvention | Threshold measurement method of trench for old recess channel |
| abstract | According to the present invention, a method for measuring a critical dimension of a trench for a sphere-type recessed channel includes forming a trench isolation layer in a first region of a semiconductor substrate having a first region and a second region, and forming a threshold dimension in a second region. Forming a measurement trench that knows the shape, forming a trench for the primary spherical recess channel in the first region, and performing anisotropic etching on the lower portion of the trench for the primary spherical recess channel. Forming a trench for the access channel, wherein the measurement trench is also etched in the horizontal direction by anisotropic etching, and the critical dimension of the measurement trench in which the etching is performed in the horizontal direction is measured, and the measurement trench And determining the threshold of the trench for the secondary spherical recess channel in comparison with the threshold. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121808-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109087923-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109087923-B |
| priorityDate | 2005-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.