| abstract |
An object of the present invention is to form an efficient micro lens for each of a plurality of semiconductor lasers in a wafer state.n n n The ejection method is such that the distance in the X-axis direction between two adjacent ejected portions coincides with the distance in the X-axis direction between any two nozzles among a plurality of nozzles arranged in the X-axis direction. A step (A) for positioning a base having two discharged portions, a step (B) for moving the plurality of nozzles relative to the base along a Y axis direction orthogonal to the X axis direction, In the case where the two nozzles respectively invade the regions corresponding to the two discharge parts by the step (B), the step (C) of discharging the liquid material from the two nozzles to the two discharge parts, respectively. ).n n n n Semiconductor laser, microlens, discharge device, discharge process, discharged part, laser element. Scanning part, optical material, discharge method |