| abstract |
A piezoelectric element comprising a piezoelectric thin film sandwiched between a lower electrode and an upper electrode, wherein the lower electrode, the upper electrode, and the piezoelectric thin film are made of perovskite oxide, and a bonding interface between the lower electrode and the upper electrode and the piezoelectric thin film In this absence, a region where the crystals of the lower electrode and / or the upper electrode and the crystal of the piezoelectric thin film are mixed is present between the lower electrode and / or the upper electrode and the piezoelectric thin film.n n n n Piezoelectric Thin Film, Piezoelectric Element, Perovskite Oxide, Sol-Gel Method |