| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F32-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-753 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07B61-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F32-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C67-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-521 |
| filingDate |
1999-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100647379-B1 |
| titleOfInvention |
Novel photoresist monomers, copolymers thereof and photoresist compositions using the same |
| abstract |
The present invention relates to a new photoresist material that can be used in the far-ultraviolet region, and contains a polymer comprising a bis (norbornene carboxylate) or bis (norbornene dicarboxylate) compound represented by the following formula (1): The photoresist composition of the present invention not only has excellent etching resistance and heat resistance, but also can significantly improve the resolution and profile of the resist.n n n [Formula 1]n n n n n n n n Wherein A, A 'R', R ", X, m and n are as defined in the specification. |
| priorityDate |
1999-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |