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filingDate 2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100641271-B1
titleOfInvention Optical Methods and Systems for Characterization of Integrated Circuits
abstract Applying a first light pulse to the surface 312 of the sample to produce a propagation strain pulse 316, 314 on the sample 315, the second light pulse being a propagation strain pulse in the sample 315. Applying a second light pulse to the surface 312 to interact with 316, 314, sensing a change in the light response of the sample 315 from the reflection of the second light pulse, and the time of occurrence of the change in the light response. A method for characterizing a sample 315 having a structure 310 disposed on or within the sample 315 is disclosed, including associating the at least one dimension with the structure 310. .
priorityDate 1999-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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