http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100639862-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2003-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100639862-B1 |
| titleOfInvention | Antireflection Film Composition |
| abstract | INDUSTRIAL APPLICABILITY The present invention can be easily applied by a conventional spin coating method, which is well dissolved in an organic solvent, and has a good storage stability, and introduces a chromophore that absorbs radiation. To provide a composition. The antireflection film-forming composition provided by the present invention comprises (A) 10 to 90 mol% of (a 1 ) (hydroxyphenylalkyl) silsesquioxanes, (a 2 ) (alkoxyphenylalkyl) silsesqui Ladder type silicone copolymer comprising 0 to 50 mol% of oxane units and 10 to 9 mol% of (a 3 ) alkyl or phenylsilsesquioxane units, (B) an acid generator that generates acid by heat or light, and ( C) The crosslinking agent is dissolved in an organic solvent, and the optical parameter (k value) for the ArF laser is characterized by being able to form an antireflection film in the range of 0.002 to 0.95. |
| priorityDate | 2002-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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