http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100628445-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49124 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 1999-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100628445-B1 |
| titleOfInvention | Insulation plate for probe card and ring insert assembly containing same |
| abstract | In the apparatus for testing a semiconductor wafer (FIG. 1), a ring insert assembly is attached between the wafer prober 14 and the test head 50. The ring insert assembly includes a ring insert 42 for supporting the probe card 62 and the insulation plate 54. The insulation plate (FIG. 3) generally comprises a rigid portion which is an annular plate made of a metal with good thermal conductivity. One surface 78 of the plate has a low emissivity and the opposite surface 76 has a low absorption. The surface of low water absorption is preferably a high gloss surface.n n n n DUT, semiconductor wafer, chuck, ring insert, insulation board, probe card, pogo pin |
| priorityDate | 1998-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.