| abstract |
Ultrafine fluid for discharging an ultrafine diameter fluid droplet onto the surface of the substrate by disposing a substrate close to the front end of the ultrafine diameter nozzle to which the solution is supplied, and by applying an arbitrary waveform voltage to the solution in the nozzle. As a jet device, the field strength in the vicinity of the nozzle front end caused by the size of the nozzle has a sufficiently large nozzle compared to the electric field acting between the nozzle and the substrate, so that the Maxwell stress and the electrowetting effect At the same time, the conductance is lowered by the diameter of the nozzle, the controllability of the discharge amount by the voltage is increased, the evaporation is reduced by the charged liquid droplets, and the liquid droplets are generated by the electric field. Ultra-fluid jet device that dramatically increases impact accuracy by using acceleration. |