http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100621394-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-16 |
| filingDate | 2004-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100621394-B1 |
| titleOfInvention | Peeling Method of Chemically Amplified Positive Photoresist Composition |
| abstract | A resist pattern peeling method having a resist pattern forming step of forming a resist pattern on a substrate using a chemically amplified positive resist composition, and a peeling step of peeling the resist pattern on a substrate using a solvent.n n n The chemically amplified positive resist composition comprising (A) an alkali-soluble resin having a hydroxyl group in a side chain, (B) a photoacid generator, and (C) a compound represented by the following general formula (I) in an organic solvent. Using the composition,n n n [Formula I]n n n n n n n n [Wherein, R 1 is an alkylene group having 1 to 10 carbon atoms which may have a substituent, etc.]n n n Moreover, the said peeling method which performs the heat processing process heat-processed at the temperature of 150-400 degreeC between the resist pattern formation process and the peeling process which peels a resist pattern. |
| priorityDate | 2003-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 210.